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Development of surface reconstruction algorithms for optical interferometric measurement

Dongxu WU, Fengzhou FANG

《机械工程前沿（英文）》 2021年第16卷第1期页码 1-31 doi: 10.1007/s11465-020-0602-6

摘要： Optical interferometry is a powerful tool for measuring and characterizing areal surface topography in precision manufacturing. A variety of instruments based on optical interferometry have been developed to meet the measurement needs in various applications, but the existing techniques are simply not enough to meet the ever-increasing requirements in terms of accuracy, speed, robustness, and dynamic range, especially in on-line or on-machine conditions. This paper provides an in-depth perspective of surface topography reconstruction for optical interferometric measurements. Principles, configurations, and applications of typical optical interferometers with different capabilities and limitations are presented. Theoretical background and recent advances of fringe analysis algorithms, including coherence peak sensing and phase-shifting algorithm, are summarized. The new developments in measurement accuracy and repeatability, noise resistance, self-calibration ability, and computational efficiency are discussed. This paper also presents the new challenges that optical interferometry techniques are facing in surface topography measurement. To address these challenges, advanced techniques in image stitching, on-machine measurement, intelligent sampling, parallel computing, and deep learning are explored to improve the functional performance of optical interferometry in future manufacturing metrology.

关键词： surface topography measurement optical interferometry coherence envelope phase-shifting algorithm

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Application and evaluation of optical distance measurements in geometrical quality testing of microgears

Albert ALBERS, Duotai PAN, Leif MARXEN, Claudia BECKE,

《机械工程前沿（英文）》 2010年第5卷第3期页码 261-269 doi: 10.1007/s11465-010-0100-3

摘要： Microgears are increasingly important in industry. Compared to normal gears, the quality assurance of microgears needs more accurately measured data and simple but feasible measurement methods because of their dimension particula

关键词： microgear optical distance measurement profile deviation CWL sensor micromechanical technology (MMT)

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A low cost wearable optical-based goniometer for human joint monitoring

Chee Kian LIM, Zhiqiang LUO, I-Ming CHEN, Song Huat YEO

《机械工程前沿（英文）》 2011年第6卷第1期页码 13-22 doi: 10.1007/s11465-011-0201-7

摘要：

Widely used in the fields of physical and occupational therapy, goniometers are indispensible when it comes to angular measurement of the human joint. In both fields, there is a need to measure the range of motion associated with various joints and muscle groups. For example, a goniometer may be used to help determine the current status of the range of motion in bend the arm at the elbow, bending the knee, or bending at the waist. The device can help to establish the range of motion at the beginning of the treatment series, and also allow the therapist to monitor progress during subsequent sessions. Most commonly found are the mechanical goniometers which are inexpensive but bulky. As the parts are mechanically linked, accuracy and resolution are largely limited. On the other hand, electronic and optical fiber-based goniometers promise better performance over its mechanical counterpart but due to higher cost and setup requirements does not make it an attractive proposition as well. In this paper, we present a reliable and non-intrusive design of an optical-based goniometer for human joint measurement. This device will allow continuous and long-term monitoring of human joint motion in everyday setting. The proposed device was benchmarked against mechanical goniometer and optical based motion capture system to validate its performance. From the empirical results, it has been proven that this design can be use as a robust and effective wearable joint monitoring device.

关键词： optical goniometer human-joint measurement

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优化光学亚像素定位精度极限——揭示小PSF的像素相位效应 Article

战海洋, 邢飞, 宝竞宇, 孙婷, 陈真真, 尤政, 袁利

《工程（英文）》 2023年第27卷第8期页码 140-149 doi: 10.1016/j.eng.2023.03.009

摘要：

Subpixel localization techniques for estimating the positions of point-like images captured by pixelated image sensors have been widely used in diverse optical measurement fields. With unavoidable imaging noise, there is a precision limit when estimating the target positions on image sensors, which depends on the detected photon count, noise, point spread function (PSF) radius, and PSF’s intra-pixel position. Previous studies have clearly reported the effects of the first three parameters on the precision limit but have neglected the intra-pixel position information. Here, we develop a localization precision limit analysis framework for revealing the effect of the intra-pixel position of small PSFs. To accurately estimate the precision limit in practical applications, we provide effective PSF (ePSF) modeling approaches and apply the Cramér-Rao lower bound. Based on the characteristics of small PSFs, we first derive simplified equations for finding the best precision limit and the best intra-pixel region for an arbitrary small PSF; we then verify these equations on real PSFs. Next, we use the typical Gaussian PSF to perform a further analysis and find that the final optimum of the precision limit is achieved at the pixel boundaries when the Gaussian radius is as small as possible, indicating that the optimum is ultimately limited by light diffraction. Finally, we apply the maximum likelihood method. Its combination with ePSF modeling allows us to successfully reach the precision limit in experiments, making the above theoretical analysis effective. This work provides a new perspective on combining image sensor position control with PSF engineering to make full use of information theory, thereby paving the way for thoroughly understanding and achieving the final optimum of the precision limit in optical localization.

关键词： Optical measurement Subpixel localization Precision limit optimization Small point spread functions Centroiding Star sensors

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位移测量光栅干涉仪综述 Special Feature on Precision Measurement and Inst

Peng-cheng HU, Di CHANG, Jiu-bin TAN, Rui-tao YANG, Hong-xing YANG, Hai-jin FU

《信息与电子工程前沿（英文）》 2019年第20卷第5期页码 631-654 doi: 10.1631/FITEE.1800708

摘要：光栅干涉仪是测量精密位移的常用方法。和激光干涉仪相比，光栅干涉仪对空气折射率不敏感且易于实现多自由度测量结构，因此被广泛研究、应用。从光学测量原理角度看，光栅干涉仪历经零差干涉、外差干涉和空间分离式外差干涉3个阶段。与前两者相比，空间分离式外差光栅干涉仪具有能消除光学混叠引起纳米级周期非线性误差的特性，可以获得更高位移测量精度。与此同时，各式各样光栅干涉仪结构被提出，以提高光学细分数、增加量程、提升适用性或实现多自由度位置姿态测量。本文详细总结了近年来增量式位移测量光栅干涉仪的发展，并简述其测量误差相关的研究。

关键词：光栅干涉仪；光学编码器；位移测量；精密测量

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density measurement for plastic injection molding via ultrasonic technology

《机械工程前沿（英文）》 2022年第17卷第4期 doi: 10.1007/s11465-022-0714-2

摘要： Density variation during the injection molding process directly reflects the state of plastic melt and contains valuable information for process monitoring and optimization. Therefore, in-situ density measurement is of great interest and has significant application value. The existing methods, such as pressure−volume−temperature (PVT) method, have the shortages of time-delay and high cost of sensors. This study is the first to propose an in-situ density measurement method using ultrasonic technology. The analyses of the time-domain and frequency-domain signals are combined in the proposed method. The ultrasonic velocity is obtained from the time-domain signals, and the acoustic impedance is computed through a full-spectral analysis of the frequency-domain signals. Experiments with different process conditions are conducted, including different melt temperature, injection speed, material, and mold structure. Results show that the proposed method has good agreement with the PVT method. The proposed method has the advantages of in-situ measurement, non-destructive, high accuracy, low cost, and is of great application value for the injection molding industry.

关键词： ultrasonic measurement melt density in-situ measurement injection molding

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立体偏转测量系统几何参数的性能分析与评价 Article

徐永佳, 高峰, 蒋向前

《工程（英文）》 2018年第4卷第6期页码 806-815 doi: 10.1016/j.eng.2018.10.007

摘要：

本文提出了一种新颖的几何参数分析方法，以提高立体偏转系统的测量精度。立体偏转测量可用于获得自由曲面的三维形貌信息。基于立体偏转测量的测量系统通常由条纹显示屏、主相机和参考相机组成。立体偏转测量系统组件的布置对于实现高精度测量十分重要。本文分析和评估了立体偏转测量系统的4个几何参数：主相机与被测物体表面之间的距离、主相机光线与被测表面法线之间的角度、条纹显示屏与被测物体之间的距离，以及主相机和参考相机之间的角度。本文通过模拟和实验数据对这些几何参数对测量精度的影响进行了验证。实验结果证实了这些参数对测量精度的影响。基于本文所提出的分析方法，一个立体偏转系统被搭建并且被用于测量一个标准的凹面镜。通过与凹面镜的给定表面参数进行比较，该系统的全局测量精度可达154.2 nm。

关键词：光学测量误差分析立体偏转测量三维形貌测量性能评估模拟

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Design and calibration of a new high-definition three-dimensional laparoscopic system

Jia TANG,Li-qiang WANG,Bo YUAN,Hong JIANG,Qi-ming ZHU

《信息与电子工程前沿（英文）》 2015年第16卷第1期页码 79-84 doi: 10.1631/FITEE.1400149

摘要： We present a high-definition (HD) 3D laparoscopic system including a dual channel optical system, two cameras, a camera control unit (CCU), and an HD 3D monitor. This laparoscopic system is capable of outputting dual high-definition videos and providing vivid 3D images. A modified pinhole camera model is used for camera calibration and a new method of depth measurement to improve precision. The average error of depth measurement measured by experiment (about 1.13 mm) was small in proportion to the large range in distance of the system (10-150 mm). The new method is applicable to any calibrated binocular vision system.

关键词： Dual optical channels Three dimensional Camera calibration Pinhole model Depth measurement Laparoscopic system

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Precision glass molding: Toward an optimal fabrication of optical lenses

Liangchi ZHANG,Weidong LIU

《机械工程前沿（英文）》 2017年第12卷第1期页码 3-17 doi: 10.1007/s11465-017-0408-3

摘要：

It is costly and time consuming to use machining processes, such as grinding, polishing and lapping, to produce optical glass lenses with complex features. Precision glass molding (PGM) has thus been developed to realize an efficient manufacture of such optical components in a single step. However, PGM faces various technical challenges. For example, a PGM process must be carried out within the super-cooled region of optical glass above its glass transition temperature, in which the material has an unstable non-equilibrium structure. Within a narrow window of allowable temperature variation, the glass viscosity can change from 10⁵ to 10¹² Pa·s due to the kinetic fragility of the super-cooled liquid. This makes a PGM process sensitive to its molding temperature. In addition, because of the structural relaxation in this temperature window, the atomic structure that governs the material properties is strongly dependent on time and thermal history. Such complexity often leads to residual stresses and shape distortion in a lens molded, causing unexpected changes in density and refractive index. This review will discuss some of the central issues in PGM processes and provide a method based on a manufacturing chain consideration from mold material selection, property and deformation characterization of optical glass to process optimization. The realization of such optimization is a necessary step for the Industry 4.0 of PGM.

关键词： precision glass molding optical lens constitutive modeling optimization manufacturing chain Industry 4.0

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国外光纤光纤带和带状光缆技术的最新发展

刘良炎

《中国工程科学》 2001年第3卷第9期页码 86-94

摘要：

综合介绍了近年国外关于低衰耗的色散补偿光纤，非零色散位移光纤，用于恶劣环境的碳涂覆和氮化硅涂覆光纤的研究；光纤带制造技术包括光纤带的结构、涂层、性能、生产工艺，大芯数光纤带状光缆包括层绞式松管、中心松管式、骨架式、干缆芯带状光缆的设计制造技术的最新进展。

关键词：光纤通信低衰耗光纤光纤带光纤带状光缆

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成像光学工程面临的光学问题

潘君骅

《中国工程科学》 2000年第2卷第3期页码 32-35

摘要：

文章简单论述了现代成像光学主要领域的情况，指出非球面反射系统是发展的必然趋势。讨论了加工与检验方面的基本情况及应着重深人研究的问题。对镜坯材料也提了一点看法。

关键词：成像光学非球面反射镜光学设计光学加工与检验

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Effects of critical geometric parameters on the optical performance of a conical cavity receiver

Hu XIAO, Yanping ZHANG, Cong YOU, Chongzhe ZOU, Quentin FALCOZ

《能源前沿（英文）》 2019年第13卷第4期页码 673-683 doi: 10.1007/s11708-019-0630-2

摘要： The optical performance of a receiver has a great influence on the efficiency and stability of a solar thermal power system. Most of the literature focuses on the optical performance of receivers with different geometric shapes, but less research is conducted on the effects of critical geometric parameters. In this paper, the commercial software TracePro was used to investigate the effects of some factors on a conical cavity receiver, such as the conical angle, the number of loops of the helical tube, and the distance between the focal point of the collector and the aperture. These factors affect the optical efficiency, the maximum heat flux density, and the light distribution in the conical cavity. The optical performance of the conical receiver was studied and analyzed using the Monte Carlo ray tracing method. To make a reliable simulation, the helical tube was attached to the inner wall of the cavity in the proposed model. The results showed that the amount of light rays reaching the helical tube increases with the increasing of the conical angle, while the optical efficiency decreases and the maximum heat flux density increases. The increase in the number of loops contributed to an increase in the optical efficiency and a uniform light distribution. The conical cavity receiver had an optimal optical performance when the focal point of the collector was near the aperture.

关键词： parabolic collector conical cavity receiver critical geometric parameters optical performance

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Recent advancements in optical microstructure fabrication through glass molding process

Tianfeng ZHOU,Xiaohua LIU,Zhiqiang LIANG,Yang LIU,Jiaqing XIE,Xibin WANG

《机械工程前沿（英文）》 2017年第12卷第1期页码 46-65 doi: 10.1007/s11465-017-0425-2

摘要：

Optical microstructures are increasingly applied in several fields, such as optical systems, precision measurement, and microfluid chips. Microstructures include microgrooves, microprisms, and microlenses. This paper presents an overview of optical microstructure fabrication through glass molding and highlights the applications of optical microstructures in mold fabrication and glass molding. The glass-mold interface friction and adhesion are also discussed. Moreover, the latest advancements in glass molding technologies are detailed, including new mold materials and their fabrication methods, viscoelastic constitutive modeling of glass, and microstructure molding process, as well as ultrasonic vibration-assisted molding technology.

关键词： optical microstructure microgroove microlens glass molding process single-point diamond cutting

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真空光镊技术综述 Special Feature on Precision Measurement and Inst

Nan LI, Xun-min ZHU, Wen-qiang LI, Zhen-hai FU, Meng-zhu HU, Hui-zhu HU

《信息与电子工程前沿（英文）》 2019年第20卷第5期页码 655-673 doi: 10.1631/FITEE.1900095

摘要：光镊技术自上世纪七十年代由阿瑟·阿什金开创以来，作为捕获和操纵中性粒子的通用工具，已在分子生物学、纳米技术和实验物理学等领域得到广泛研究和应用。基于光镊技术的传感与精密测量系统，通过激光束悬浮传感单元，而非与装置固连，相比传统固态传感器，无机械耗散。此外，与液体或空气介质中的光镊系统不同，在真空中运作的光镊系统可实现传感单元与环境的完全隔离。基于上述优势，基础物理学和应用物理学领域科学家对真空光镊开展了大量研究。本文回顾了真空光镊技术的基本概念和发展历史，帮助读者全面了解该领域。

关键词：光镊；真空光阱；激光冷却

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光传送网中光监控通道信号Q值在线监测技术

唐勇,孙小菡,张明德,丁东

《中国工程科学》 2001年第3卷第12期页码 71-75

摘要：

提出了一种带有光监控通道（OSC）子系统的光传送网（OTN）分层结构模型，分析了OSC中的信号特点，指出OSC信号质量决定了运行、管理和维护（OAM）信号的可靠性。依据Q值与误码率（BER）的一一对应关系，提出了一种可在线监测OSC信号Q值的方案，并基于数字信号处理芯片（DSP）技术设计了监测模块，实现了OSC信号在线Q值监测。

关键词：光传送网（OTN）光监控通道（OSC）运行、管理和维护（OAM） Q值监测